Atomic layer deposition (Picosun R-200 Advanced) with sources for Aluminum oxide and Hafnium oxide deposition capability) + Ozonator (InUSA AC Series Ozone Generator)
Undefined
Published on IESL-FORTH (https://www.iesl.forth.gr)
Atomic layer deposition (Picosun R-200 Advanced)
Submitted by waliakon on Mon, 06/20/2022 - 12:22