Plasma enhanced CVD system (Vacutec 1500)

Published on IESL-FORTH (https://www.iesl.forth.gr)

Submitted by waliakon on Mon, 06/20/2022 - 12:20

Plasma enhanced CVD system (Vacutec 1500) with in situ optical emission spectroscopy diagnostic technique (Jobin Yvon Sofie).

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