Published on IESL-FORTH (https://www.iesl.forth.gr)

A comparative study of nanostructured Silicon-Nitride electrical properties for potential application in RF-MEMS capacitive switches

Undefined
D. Birbiliotis, G. Stavrinidis, M. Koutsoureli, G. Konstantinidis, G. Papaioannou, A. Ziaei
100-101
113360
2019
doi.org/10.1016/j.microrel.2019.06.052
Journal
Microelectronics Reliability