Published on
IESL-FORTH
(
https://www.iesl.forth.gr
)
On the discharge transport mechanisms through the dielectric film in MEMS capacitive switches
Language
Undefined
D. Birbiliotis, G. Stavrinidis, M. Koutsoureli, G. Konstantinidis, G. Papaioannou
202
1-12
2020
doi.org/10.1109/JMEMS.2019.2962068
Journal
Journal of Microelectromechanical Systems
