Published on IESL-FORTH (https://www.iesl.forth.gr)

Field emission induced damage in the actuation paths of MEMS capacitice structures

Undefined
J. Theocharis, M. Koutsoureli, S. Gardelis, G. Konstantinidis, G. Papaioannou
114
113760
2020
doi.org/10.1016/j.microrel.2020.113760
Journal
Microelectronics Reliability