Published on
IESL-FORTH
(
https://www.iesl.forth.gr
)
A study of high field hopping transport during discharging in SiNx films for MEMS capacitive switches
Language
Undefined
D. Birmpiliotis, M. Koutsoureli, G.Stavrinidis, G. Konstantinidis, G. Papaioannou
114
113878
2020
doi.org/10.1016/j.microrel.2020.113878
Journal
Microelectronics Reliability
