This is a dual chamber Graphene / Transtition metal dichalcogenide CVD system developed by PlanarTECH the system is a planarGROW-2S

The graphene chamber has:

• Quartz 2" growth tube
• SIngle growth zone up to 1100 C
• Heated precursor chamber
• Input gasses are:
  • Hydrogen / Methance / Argon
• Automatic
  • pressure
  • flow
  • pump control
• Full recipee mode

The TMD chamber has:

• Quartz 2" growth tube
• Double growth zone each up to 1100 C
• Input gasses are:
  • Hydrogen / Argon
• Automatic
  • pressure
  • flow
  • pump control
• Full recipee mode

For more information or to request access /  samples please contact George Deligeorgis [1]