IESL-FORTH
Published on IESL-FORTH (https://www.iesl.forth.gr)


Laser micro machining of 3C–SiC single crystals

Undefined
Sandra Zoppel, MariaFarsari, Robert Merz, Johann Zehetner Günther Stangl, Georg A. Reider, Costas Fotakis
83
4-9
1400-1402
2006
https://doi.org/10.1016/j.mee.2006.01.064
Journal
Microelectron. Eng.