Published on
IESL-FORTH
(
https://www.iesl.forth.gr
)
Laser micro machining of 3C–SiC single crystals
Language
Undefined
Sandra Zoppel, MariaFarsari, Robert Merz, Johann Zehetner Günther Stangl, Georg A. Reider, Costas Fotakis
83
4-9
1400-1402
2006
https://doi.org/10.1016/j.mee.2006.01.064
Journal
Microelectron. Eng.