Published on
IESL-FORTH
(
https://www.iesl.forth.gr
)
Surface morphology studies of sub-ps pulsed laser deposited AlN thin film
Language
Undefined
E. Gyorgy, V.S. Teodorescu, I.N. Mihailescu, A. Klini, V. Zorba, A. Manousaki, C. Fotakis
19
820
2004
10.1557/jmr.2004.19.3.820
Journal
J. Mater. Res.
