Ultraviolet laser microstructuring of silicon and the effect of laser pulse duration on the surface morphology.

Published on IESL-FORTH (https://www.iesl.forth.gr)

Ultraviolet laser microstructuring of silicon and the effect of laser pulse duration on the surface morphology.

Language English

Skantzakis E, Zorba V, Papazoglou DG, Zergioti I, Fotakis C

252

13

4462-4466

2006

10.1016/j.apsusc.2005.07.120

Journal

Appl Surf Sci