Published on
IESL-FORTH
(
https://www.iesl.forth.gr
)
Modeling and de-embedding the interferometric scanning microwave microscopy by means of dopant profile calibration
Language
English
L. Michalas, F. Wang, C. Brillard, N. Chevalier, J.M Hartmann, R. Marcelli, D. Theron
107
223102
2015
doi.org/10.1063/1.4936761
Journal
Appl. Phys. Lett.
