Reactive Ion Etching system (Vacutec 1500) with in situ laser interferometry and optical emission spectroscopy end-point detection techniques (Jobin Yvon Sofie)
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Published on IESL-FORTH (https://www.iesl.forth.gr)
Reactive Ion Etching system (Vacutec 1500)
Submitted by waliakon on Mon, 06/20/2022 - 12:05