Published on
IESL-FORTH
(
https://www.iesl.forth.gr
)
Thermally activated discharging mechanisms in SiNx films with embedded CNTs for RF MEMS capacitive switches
Language
Undefined
M. Koutsoureli, G. Stavrinidis, D. Birbiliotis, G. Konstantinidis, G. Papaioannou
223
111230
2020
doi.org/10.1016/j.mee.2020.111230
Journal
Microelectronic Engineering
