Published on IESL-FORTH (https://www.iesl.forth.gr)

Role of laser pulse duration and gas pressure in deposition of AlN thin films

English
E. Gyorgy, C. Ristoscu, I. Michailescu, A. Klini, N. Vainos, C. Fotakis, C. Ghica, G. Schmerber, J. Faerber
90
456
2001
10.1063/1.1376417
Journal
J. Appl. Phys.