Published on IESL-FORTH (https://www.iesl.forth.gr)

Beyond 100 nm resolution in 3D laser lithography—Post processing solutions

Undefined
Gediminas Seniutinas, Andreas Weber, Celestino Padeste, Ioanna Sakellari, Maria Farsari, Christian David
191
25
2018
doi.org/10.1016/j.mee.2018.01.018
Journal
Microelectronic Engineering