Intra-cavity total reflection Ellipsometer system for time-dependent and sensitive measurement of ellipsometric parameters of material

Published on IESL-FORTH (https://www.iesl.forth.gr)

Intra-cavity total reflection Ellipsometer system for time-dependent and sensitive measurement of ellipsometric parameters of material

Language English

FORTH

Prof. Rakitzis Peter

PCT/IB2010/001154

2010