RF MEMS switches

Contact Person(s):
Dr. George Konstantinidis

Download PDF


In the past we fabricated RF MEMS switches that required a high turn on voltage.
We are currently establishing a new fabrication protocol. A major alteration was the change of the plating system. We are targeting a turn on voltage of below 10V.
Another critical issue that we are investigating is the compatibility of the switch fabrication with III-nitride acoustic sensors incorporating very thin membranes.


Research Topics
Membrane Supported Microsystems

Project Members
Mr. George Stavrinidis
Dr. George Konstantinidis

Last Updated:  11/1/2010