MEMs ICs (III-nitrides)

Contact Person(s):
Dr. George Konstantinidis


This is a new field of research. The main issue here is material and fabrication compatibility between HEMTs and micromachined layers.


Research Topics
Membrane Supported Microsystems


Dr. Alexandru Muller

Dr. Dan Necoloiu, IMT Bucharest

Dr. Afshin Ziaei, TRT

Project Members
Dr. George Konstantinidis
Mr. Thanassis Kostopoulos
Prof. Alexandros Georgakilas
Prof. Eleftherios Iliopoulos
Mr. George Stavrinidis

Last Updated:  11/1/2010